Why euv lithography

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EUV lithography - how does it work? EUV lithography — how does it work? Journalists Our photonics industry portal. Journalists Reducing complex content.

The EUV beam reflected by the mask is exposed by the projection optics to form a pattern on photoresist that is coated on a wafer surface. See figure 1. Today, EUV lithography technology including the light source is still under development; it is expected to be put into practical use within several years.

The output power required for high-volume production is W or more.